Facilities @ Feng Yan Lab
Thin Film Deposition
Device Fabrication
Device Characterization
Public Facilities @ UA
- X-ray Diffraction:Bruker D8 Discover with GADDS
- Atom Probe:IMAGO Local Electrode Atom Probe (LEAP)
- Scanning Electron Microscopes:JEOL 7000 FE Scanning Electron Microscope
- Focused Ion Beam:TESCAN LYRA FIB-FESEM; FEI Quanta 3D Dual Beam
- Transmission Electron Microscopes: FEI Tecnai F-20 Transmission Electron Microscope
- ESCA (XPS) – Auger Analysis: Kratos Axis 165 XPS/Auger
- Electron Probe Micro Analyzer (EPMA): JEOL 8600 EPMA
- Preparation Facilities:Wet Preparation Facility (TEM); Coating, Milling, and Other Non-Wet Preparation (SEM, TEM)
Micro-fabrication Facility (MFF Clean Room)
The MFF in the North Engineering Research Center (NERC) is housed in a 7111 sq. ft. facility, consisting of three Class 100/1000 cleanroom bays and support areas. The cleanroom bays are for photolithography (Class 100), deposition (Class 1000) and etch (Class 1000), respectively. Equipment available for shared use in the cleanroom include the following:
Center for Materials for Information Technologies Facility
The MFF in the North Engineering Research Center (NERC) is housed in a 7111 sq. ft. facility, consisting of three Class 100/1000 cleanroom bays and support areas. The cleanroom bays are for photolithography (Class 100), deposition (Class 1000) and etch (Class 1000), respectively. Equipment available for shared use in the cleanroom include the following:
- Karl Suss MA-6 mask aligner
- Solitec Spinner
- SFI Shamrock Sputtering System
- Denton E-Beam Evaporation System
- STS PECVD System
- Ion Mills (Intelvac and Four-Wave)
- STS Advanced Silicon Etcher
- STS Advanced Oxide Etcher
- Plasmatherm Dual-Chamber Reactive ion Etch System
Center for Materials for Information Technologies Facility
- DekTak II
- Digital Instruments Dimension 3100 AFM
- DMS Vibrating Sample Magnetometer
- Durham Magneto Optics NanoMOKE3
- Philips X-Ray Diffraction
- Princeton Alternating Gradient Magnetometer
- Quantum Design – Physical Properties Measurement System
- Quantum Design -Magnetic Properties Measurement System
- Quantum Design Dynacool PPMS
- Rigaku X-Ray Diffraction
- Woolam Variable Angle Spectroscopic Ellipsometer
